Flat sensor, arrangement for a flat sensor, and method for compensating for thermal deformations

Abstract

To compensate for modules which expand as a function of temperature, the present invention provides for using a flat sensor having special structural components that feature temperature-dependent electrical conductivity over the entire length to be measured. The benefit derived is that the temperature is measured over the entire sensor. The structural components are interconnected into tracks, and linked to electronics integrated on the sensor. On its rear side, the sensor has an adhesive layer, enabling it to be simply adhesively mounted on the component to be measured. The manner in which the structural components are distributed, makes it possible to adjust the sensor to any desired length, simply by trimming it. After the sensor is mounted, a protective layer is adhesively applied thereto, as a protective measure. Moreover, sensors of this kind are arranged in accordance with the present invention on machine-tool parts which deform, to determine the temperature that is significant for dimensional accuracy. In this context, the sensors are positioned in parallel to the thermal deformation direction to be expected. By properly selecting these sensors, one can reduce the number of required sensors, as compared to known methods heretofore. An additional benefit derived from these sensors is the fact that only simple, linear calculations are required to precisely compensate for thermal deformations in the machine tool. The determined compensation signals are subsequently fed to position control loops of the machine tool.