The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2003
Filed:
Sep. 07, 2000
Other;
Abstract
In an excimer laser apparatus comprising a laser chamber filled with a laser gas, a discharge excitation portion provided in the laser chamber , a rotary shaft to which a gas circulating fan for circulating the laser gas is fixed, a shield partition wall for forming a sealed space to enclose the rotary shaft , a magnetic bearing of a control type including a rotor portion provided on the rotary shaft side and a stator portion provided outside the shield partition wall and serving to pivotally support the rotary shaft in non-contact, a driving motor provided outside the laser chamber , magnetic coupling portions and for transmitting driving force of the driving motor to the rotary shaft through the shield partition wall in non-contact, and rotary shaft sensors and for detecting a position of the rotor portion with respect to the stator portion . The shield partition wall of the magnetic coupling portions and is formed of ceramic and the shield partition wall of the magnetic bearing is formed of metal.