The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2003
Filed:
Jul. 13, 2000
Applicant:
Inventor:
Shigeo Kobayashi, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 2/742 ; G03B 2/758 ; G03B 2/762 ;
U.S. Cl.
CPC ...
G03B 2/742 ; G03B 2/758 ; G03B 2/762 ;
Abstract
An exposure apparatus for performing plural processes to transfer, by exposure, a pattern of a mask onto a photosensitive substrate. The apparatus includes a vibration detector for detecting vibration information related to the exposure apparatus, a memorizing unit for memorizing a vibration pattern of the exposure apparatus and a maintenance condition, in relation to each of the processes, and a discriminating device for discriminating whether maintenance is necessary on the basis of the detected vibration information while referring to the vibration pattern and the maintenance condition memorized in relation to each process.