The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2003
Filed:
Apr. 16, 2001
Applicant:
Inventors:
Ian Moncrieff, Wotton-under-Edge, GB;
Clive Luca Widdicks, Bristol, GB;
Assignee:
Trikon Holdings Limited, Newport, GB;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01F 2/710 ;
U.S. Cl.
CPC ...
H01F 2/710 ;
Abstract
This invention relates to a method of cooling an immersed induction coil, such as an ionizing coil used in a vacuum processing chamber. The coil may comprise a coiled hollow tube through which coolant can flow when pumped by a pump A valve is provided so that air can be passed through the tube in either direction and the direction of flow is controlled by a controller which acts on the valve The rate of switching of the valve can be determined by a process condition or by monitoring the temperature of the downstream coolant and/or the coil.