The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2003
Filed:
Jan. 28, 2000
Applicant:
Inventors:
Assignee:
Denki Kagaku Kogyo Kabushiki Kaisha, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01J 2/726 ; H01J 9/14 ;
U.S. Cl.
CPC ...
H01J 2/726 ; H01J 9/14 ;
Abstract
A liquid metal ion source comprises a reservoir storing a metal to be ionized and a needle electrode to which the metal is fed from the reservoir wherein the size of small pits formed in at least a cone surface of the needle electrode is 0.1 &mgr;m-1.5 &mgr;m and the small pits exist in the cone surface of the needle electrode in a density of 5×10 number/mm -5×10 number/mm the small pits being formed by chemically etching.