The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2003
Filed:
Jul. 14, 2000
Applicant:
Inventor:
Brian Martin, Plymouth, GB;
Assignee:
Mitel Semiconductor Limited, Swindon, GB;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/26 ;
U.S. Cl.
CPC ...
G03F 7/26 ;
Abstract
A method of manufacturing integrated circuits is performed by coating a substrate with resist, exposing the resist to light through a pattern in a mask so as to define slots in the resist corresponding to the pattern in the mask, chemically developing the resist after exposure to light, and choosing the thickness of the resist so as to achieve the desired profile of the slots defined in the resist.