Optical waveguide element, manufacturing method for optical waveguide element, optical deflecting element, and optical switching element

Abstract

An optical waveguide element capable of being coupled with optical fibers at high coupling efficiency is to be provided. Also an optical waveguide element manufacturing method permitting accurate production of such optical waveguide elements is to be provided. The optical waveguide element is provided with a buffer layer formed over a monocrystalline substrate and an optical waveguide layer formed over the buffer layer, and a recess is formed in the buffer layer along the lengthwise direction of the monocrystalline substrate. The optical waveguide layer is provided to fit into this recess to form a channel optical waveguide. Over the upper face of the optical waveguide layer on the light incidence side and the light emission side, a cladding layer whose refractive index is smaller than that of the optical waveguide layer and whose thickness increases towards the end face(s) in a flared shape is provided in the same width as that of the monocrystalline substrate. By providing the cladding layer whose refractive index is smaller than that of the optical waveguide layer, it is made possible to expand the mode field diameter and substantially reduce the coupling loss between the optical fiber and the optical waveguide element. Further by increasing the thickness of the cladding layer in a flared shape toward the end face(s), it is made possible to gradually compress the mode field diameter and to reduce the optical propagation loss within the optical waveguide.