The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2003
Filed:
May. 23, 2000
Applicant:
Inventor:
Masatoshi Ikeda, Tokyo, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 2/742 ; G03B 2/752 ; G02B 7/02 ;
U.S. Cl.
CPC ...
G03B 2/742 ; G03B 2/752 ; G02B 7/02 ;
Abstract
A projection exposure apparatus for transferring a pattern on a mask onto a substrate, including a projection optical system having a first reflection optical element for bending an optical axis, a first optical system arranged between the mask and the first reflection optical element, and a second optical system arranged between the first reflection optical element and the substrate; a frame for integrally supporting a first barrel for holding the first optical system and a second barrel for holding the second optical system, and a connecting member for connecting the first barrel and the second barrel at positions different from the frame.