The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2003
Filed:
Aug. 28, 1998
Keith C. Stevens, Fairfield, VT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method of detecting defects in a semiconductor device by providing the semiconductor device with an electron-generating photodiode region to be used as a circuit stimulus in response to incident light, and also with conductive paths connecting the photodiode electron-generating region to terminals of polysilicon gate areas. The photodiode region of the semiconductor device is illuminated with light to stimulate the semiconductor device, and light emitted therefrom is detected. The semiconductor device can consist of a silicon chip, particularly a polysilicon gated field effect transistor silicon chip, wherein the photodiode electron-generating region possesses a diffused region therein.