The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2003
Filed:
Jun. 29, 2000
Applicant:
Inventors:
Carsten Schuh, Baldham, DE;
Karl Lubitz, Ottobrunn, DE;
Dieter Cramer, Graz, AT;
Thorsten Steinkopff, Eglharting, DE;
Iris Hahn, Neubiberg, DE;
Andreas Wolff, Munich, DE;
Clemens Scherer, Gilching, DE;
Assignee:
Siemens Aktiengesellschaft, Munich, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 4/108 ; H01L 4/122 ;
U.S. Cl.
CPC ...
H01L 4/108 ; H01L 4/122 ;
Abstract
A piezo actuator with an actuator body has at least one electrically conductive multi-layer film with a rigid electrical terminal element. The multi-layer film controls expansion and attraction of the actuator body. An electrical conduction layer of the multi-layer film has at least one recess to increase flexibility. The recesses in the conduction layer are, for example, photolitho-graphically produced.