The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2003
Filed:
Mar. 01, 2001
Michael J. Daneman, Pacifica, CA (US);
Behrang Behin, Berkeley, CA (US);
Onix Microsystems, Richmond, CA (US);
Abstract
A MEMS device with a flap having one or more conductive landing areas electrically isolated from the flap and electrically coupled to a landing surface to reduce stiction. The device may be formed from a device layer of a silicon-on-insulator (SOI) substrate with conductive landing pads fabricated by forming one or more vias through the device layer, an underlying sacrificial layer etched to form one or more depressions at locations corresponding the vias and filled with a conductive landing pad material to form a structure having one or more electrically isolated landing pad areas on an underside of the device layer. A method for operating a MEMs device in an equipotential stiction reduction mode is also provided.