The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2003
Filed:
Nov. 30, 2000
Applicant:
Inventors:
Masumi Katagami, Tokyo, JP;
Miyuki Kaneyama, Tokyo, JP;
Assignee:
Other;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 9/00 ; H01J 3/7304 ;
U.S. Cl.
CPC ...
G03F 9/00 ; H01J 3/7304 ;
Abstract
A scanning electron microscope capable of imaging a specimen at a magnification lower than the minimum magnification of the microscope. The specimen surface is virtually partitioned into cells. The specimen is so moved that the cells can be individually scanned by the electron beam and hence image data can be taken from each cell. Image data derived from each cell by the scan is stored in locations of an image memory that are addressed corresponding to the positions of the cells.