The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2003
Filed:
Mar. 02, 2001
Applicant:
Inventors:
Hideki Komori, Aizuwakamatsu, JP;
David K. Foote, San Jose, CA (US);
Fei Wang, San Jose, CA (US);
Bharath Rangarajan, Santa Clara, CA (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/176 ;
U.S. Cl.
CPC ...
H01L 2/176 ;
Abstract
A method for fabricating a semiconductor structure includes growing regions of oxide on a first structure, to form bit-line regions; wherein said semiconductor structure includes a semiconducting substrate, a patterned ONO layer on said substrate, wherein said patterned ONO layer comprises regions of ONO and exposed regions of said semiconducting substrate, a patterned hard mask layer on said regions of ONO, and a patterned photoresist layer on said patterned hard mask layer.