The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2003
Filed:
Jun. 05, 2000
Applicant:
Inventor:
Felix Mullis, Flums, CH;
Assignee:
Unaxis Balzers Aktiengesellschaft, Balzers, LI;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/434 ; C23C 1/600 ;
U.S. Cl.
CPC ...
C23C 1/434 ; C23C 1/600 ;
Abstract
A vacuum treatment system in which a part ( ) is provided inside a vacuum treatment chamber ( ). A potential (&phgr; ) which deviates from the system reference potential (&phgr; ) by approximately at least ±12 V is applied to said part. A sensor and/or an actuator ( ) is/are arranged on said part. In addition, the invention comprises an electronic unit ( ) which is connected to the sensor and/or actuator. Processing signals on the unit ( ) is considerably simplified in that the electronic unit ( ) is operated as a reference potential on the potential (&phgr; ) of said part ( ).