The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2003
Filed:
Apr. 24, 2002
Applicant:
Inventors:
Hans-Peter Landgraf, Regensburg, DE;
Henderikus-L. Offereins, Langquaid, DE;
Assignee:
Siemens Aktiengesellschaft, Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 9/00 ; G01L 9/16 ;
U.S. Cl.
CPC ...
G01L 9/00 ; G01L 9/16 ;
Abstract
A disk-shaped silicon sensor element for a pressure sensor is described. The sensor element has a disk upper side, a disk underside, stress measuring elements that convert mechanical stresses into signals, and circuits disposed on the disk upper side. The disk underside serves during a pressure measurement for receiving a force that acts as a bending pressure for bending the disk-shaped silicon sensor element. The sensor element is formed with essentially the same thickness over its entire extent.