The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2003
Filed:
Mar. 19, 2001
Hideya Kurachi, Aichi-ken, JP;
Manabu Kato, Aichi-ken, JP;
Aisin Seiki Kabushiki Kaisha, Aichi-ken, JP;
Abstract
The angular speed sensor device includes a drive frame and a detecting frame which are supported on a silicon substrate in a floating mode. The drive frame and the detecting frame are provided with an angular speed about the z-axis when the drive frame and the detecting frame are driven to vibrate in the x-direction, the resulting Corliolis force causing the detecting frame to oscillate in the y-direction. Such a y-direction oscillation of the detecting frame is detected as a displacement signal. On the basis of the displacement signal, the applied angular speed is calculated. The angular speed sensor device includes detecting electrodes and which drive the detecting frame to vibrate in the y-direction when a drive signal is fed to each of the detecting electrodes and which changes the electrostatic capacitance between the detecting frame and each of the detecting electrodes and On the basis of the drive signal and the displacement signal which are fed to each of the detecting electrodes and , the resonant frequency of the detecting frame when it is driven to vibrate in the y-direction and the corresponding Q-value are determined.