The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2003
Filed:
Mar. 15, 2001
Applicant:
Inventors:
Karsten Kraiczek, Landau, DE;
Beno Mueller, Ettlingen, DE;
Assignee:
Agilent Technologies, Inc., Palo Alto, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 2/714 ; G02B 2/710 ; G02B 5/04 ;
U.S. Cl.
CPC ...
G02B 2/714 ; G02B 2/710 ; G02B 5/04 ;
Abstract
A beam splitter has a support frame made of silicon that has a membrane inside made of silicon. The membrane has in particular openings with bridges formed between them. On the side of membrane facing the incident beam is an aluminum coating to increase the reflectability or degree of reflection of the membrane. An incident beam bundle contacts the beam splitter at angle of incidence &phgr;. A portion of the incident beam is reflected off the bridges, and the remaining portion of the beam freely passes through the openings. The beam is correspondingly divided into a reflective portion and transmitted portion.