The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2003
Filed:
Jan. 11, 2001
Applicant:
Inventors:
Assignee:
Murata Manufacturing Co., Ltd., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 4/1187 ;
U.S. Cl.
CPC ...
H01L 4/1187 ;
Abstract
A method for manufacturing a langasite single crystal substrate comprises the steps of polishing at least one of the main surfaces of a raw material substrate; and wet-etching said polished main surface of the substrate with a solution including H PO , HNO and CH COOH.