The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2003
Filed:
Apr. 18, 2001
Applicant:
Inventors:
Lilac Muller, Boulder, CO (US);
Bevan Staple, Longmont, CO (US);
Assignee:
Network Photonics, Inc., Boulder, CO (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/714 ;
U.S. Cl.
CPC ...
H01L 2/714 ;
Abstract
A method for fabricating a micromachined device with a fast release step is provided. A first undoped sacrificial layer is deposited on a structural layer. A doped sacrificial layer is deposited on the first undoped sacrificial layer. A second undoped sacrificial layer is deposited on the doped sacrificial layer to produce a layered structure. An etchant is then applied to the layered structure.