The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2003
Filed:
Mar. 07, 2000
Lukas E. Howald, Dornach, CH;
Nanosurf AG, Liestal, CH;
Abstract
Finely adjustable actuators are used for positioning a sensor or a scanning tip, especially for scanning tunnelling microscopes and other scanning microscopes, i.e. scanning probe microscopes. The invention relates to the construction of such an actuator which can carry out three-dimensional movements of a scanning tip with high regulating accuracy while being of robust and compact design. This is achieved by a sensible arrangement of a plural number of electromagnetic actuator elements acting on a common rigid sensor carrier. The invention provides a robust and relatively simple solution for positioning the scanning tip; an important and problematic task in scanning probe microscopy and in related fields. It permits positioning at high resolution as well as with a relatively long regulating range. Further advantages include good repetition accuracy and little mass which reduces both energy consumption and interference.