The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2003
Filed:
Aug. 23, 2000
Ying Michael Cheng, Thousand Oaks, CA (US);
Thomas Richard Lepkowski, Merrimack, NH (US);
Costas Varmazis, Chelmsford, MA (US);
Tyco Electronics Corp., Middletown, PA (US);
Abstract
A process of simultaneously forming a plurality of metal features on a substrate, in which at least one metal feature has undercut sides and at least one metal feature does not have undercut sides involves the application of a lower photoresist feature having rounded sides and an upper photoresist feature having undercut sides wherein the upper photoresist feature is positioned in offset relation to the lower photoresist feature such that one edge of the upper photoresist feature does not extend over the corresponding edge of the lower photoresist feature and the other edge of the upper photoresist feature does extend beyond the corresponding edge of the lower photoresist feature.