The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2003
Filed:
Sep. 25, 2000
Applicant:
Inventor:
Kiyoshi Araki, Nagoya, JP;
Assignee:
NGK Insulators, Ltd., Nagoya, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B32B 9/04 ; B32B 1/520 ;
U.S. Cl.
CPC ...
B32B 9/04 ; B32B 1/520 ;
Abstract
A corrosion-resistant member includes a substrate made of an aluminum-containing ceramic material and an aluminum fluorine containing film which coats at least a part of a surface of the substrate. The aluminum fluorine-containing film, which is formed by directly contacting the substrate with a fluorine-containing compound, has a thickness of 0.01-5.0 &mgr;m. The substrate contains silicon in an amount of not more than 0.5% by weight when calculated as silicon dioxide. Thereby, changes in weight due to corrosion can be decreased and generation of particles can be further controlled upon exposure to a corrosive halogen gas.