The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2003
Filed:
Feb. 28, 2000
Applicant:
Inventor:
Akio Nishikata, Kitamoto, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06K 7/10 ; G06K 5/04 ;
U.S. Cl.
CPC ...
G06K 7/10 ; G06K 5/04 ;
Abstract
An exposure substrate of the invention is characterized in that at least one mark representing information related to the exposure substrate is provided on a part of the exposure substrate, and at least one of the marks contains information related to a mark readout operation. This information may include; the number, the position, or the order for reading the other marks to be read, or an end of information to be read. According to the present invention, information for other marks can be obtained from one mark, therefore, an optional number of marks can be read automatically.