The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2003
Filed:
Jul. 12, 2001
Masao Sato, Chiba, JP;
Seiko Instruments Inc., , JP;
Abstract
In order to realize accurate measurement with an X-ray fluorescence thickness tester characterized by being non-destructive and non-contacting, a system comprises an X-ray generating source, a collimator for focusing primary X-rays, and a sample observation optical system for positioning and observation of microscopic sections. As thickness testing means, as detectors for detecting X-ray fluorescence generated from the sample there is one sensor having low counting efficiency but excellent energy resolution used for low energy counting, and another sensor having poor energy resolution but excellent counting efficiency used for counting high energy, these two sensors being arranged next to each other, and in stages subsequent to the detector preamps there are separate linear amps and frequency analyzers with respective signals being subjected to processing as spectrums for qualitative and quantitative analysis in a common control and computing section.