The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2003
Filed:
Dec. 22, 2000
Steven J. Laureanti, Lewisville, TX (US);
Ericsson, Inc., Richardson, TX (US);
Abstract
A system, and methods of its use, for characterizing semiconductor wafers with enhanced S parameter contour mapping employ small signal scatter parameter measurements of a representative sample of die to create a contour map of a wafer surface. Those die which fail to meet performance specifications are marked as bad die before the wafer is sent to a back-end process, where the unmarked good die are extracted and assembled into working products. By using enhanced S parameter mapping for characterizing the die, only those die marked as bad die need be discarded. Thus, instead of scrapping an entire wafer die lot based on the failure of a single die from that wafer, the wafer sort yield may be dramatically increased. The increase in wafer sort yield in turn, increases total production yield.