The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 11, 2003
Filed:
Mar. 05, 2001
Applicant:
Inventor:
Takehiko Mayama, Tochigi, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G05D 2/3275 ;
U.S. Cl.
CPC ...
G05D 2/3275 ;
Abstract
An oscillation isolator for supporting an oscillation isolation platform on a pedestal includes an active oscillation isolator having a displacement generating type actuator to reduce oscillation of the platform and a displacement adjuster provided between the active oscillation isolator and the platform or the pedestal for adjusting relative displacement between the active oscillation isolator and the platform or the pedestal. The displacement adjuster has a rigidity higher than that of the active oscillation isolator and is dynamically located in series between the active oscillation isolator and the platform or the pedestal.