The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 11, 2003

Filed:

Nov. 16, 1999
Applicant:
Inventors:

Akira Hochi, Nara, JP;

Mamoru Takeda, Kyoto, JP;

Kazuyuki Sakiyama, Shijyonawate, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 6/504 ; H01J 2/342 ;
U.S. Cl.
CPC ...
H01J 6/504 ; H01J 2/342 ;
Abstract

Relatively uniform high frequency energy can be applied to a planar or linear discharge space and a more uniform discharge can be produced by using an electrodeless discharge energy supply apparatus which comprises a surface wave transmission line for exciting a surface wave by a high frequency, the surface wave transmission line being formed from a conductive material having a periodic array of corrugations wherein using the surface wave produced in the vicinity of the surface wave transmission line energy necessary to produce an electrodeless discharge is supplied to an electrodeless discharge tube


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