The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 11, 2003
Filed:
Jan. 24, 2001
Tomoe Yamamoto, Tokyo, JP;
NEC Corporation, Tokyo, JP;
Abstract
When fabricating an MIM capacitive circuit in which a lower electrode and an upper electrode confront each other through a capacitive film, the lower electrode composed of titanium nitride (TiN), which is a metal that is resistant to oxidation by sulfuric acid, is formed on a substrate, following which the surface of this lower electrode is cleaned with a solution containing sulfuric acid, preferably, dilute sulfuric acid. A capacitive film composed of the dielectric material tantalum oxide (Ta Q ) is then formed on the surface of the cleaned lower electrode, following which an upper electrode composed of the metal titanium nitride (TiN) is formed on the surface of the capacitive film. Cleaning with dilute sulfuric acid eliminates the presence of organic material or oxide material on the surface of the lower electrode, thereby preventing leakage current that is caused by these materials.