The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 11, 2003
Filed:
Jan. 13, 2000
Applicant:
Inventors:
Assignee:
National Science Council, Taipei, TW;
Primary Examiner:
Int. Cl.
CPC ...
H01J 9/02 ;
U.S. Cl.
CPC ...
H01J 9/02 ;
Abstract
A process for forming a film on a substrate having a field emitter is disclosed. The substrate and field emitter are cleaned by hydrogen plasma to remove the impurities. Next, a silicon carbide film is selectively formed over said field emitter. A negative bias voltage of about 150 V to about 300 V is applied to substrate for increasing the nucleation sites of said silicon carbide film. Afterward, the negative bias voltage is stopped so as to grow a carbon-containing film from said silicon carbide film.