The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 04, 2003

Filed:

Feb. 26, 2001
Applicant:
Inventor:

Frank Richter, Dresden, DE;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 3/102 ;
U.S. Cl.
CPC ...
G01R 3/102 ;
Abstract

With increasing integration density of integrated circuits, the packing density in test regions (kerf structures) located between the integrated circuits cannot be increased substantially, since the majority of the available area is occupied by contact areas. The invention is therefore directed toward a test structure region on a wafer having contact areas for applying voltages and test components between the contact areas. The test structure includes at least two test components that are arranged between two adjacent contact areas. The test components are each connected to the adjacent contact areas so that a voltage can be applied to the test components via the contact areas.


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