The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 04, 2003

Filed:

Jan. 11, 2002
Applicant:
Inventors:

Hao Fang, Cupertino, CA (US);

Narbeh Derhacobian, Belmont, CA (US);

Assignee:

Advanced Micro Devices, Inc., Sunnyvale, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/1336 ;
U.S. Cl.
CPC ...
H01L 2/1336 ;
Abstract

A method of manufacturing a high voltage transistor exhibiting high gated diode breakdown voltage, low leakage and low body effect while avoiding an excessive number of costly masking steps. A high gated diode breakdown voltage is provided in the manufacturing process by masking the high voltage junctions from the conventional field implant and masking the source/drain regions from the conventional threshold adjust implant. Angled openings are formed in the field implant blocking mask so that the field implant at varying distances away from the junctions, thus achieving low leakage and a high gated diode breakdown voltage. The field implant blocking mask is extended over the channel area, thereby producing a transistor with low body effect.


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