The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2003
Filed:
May. 28, 1999
Applicant:
Inventor:
Kyoichi Inaki, Tokorozawa, JP;
Assignee:
Other;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B32B 1/700 ;
U.S. Cl.
CPC ...
B32B 1/700 ;
Abstract
A quartz glass member for use in dry etching, wherein at least the inner surface of the member to be brought into contact with plasma is constructed of synthetic quartz glass, and a dry etching system equipped with the same member. A dry etching system equipped with the quartz glass member, which minimizes the generation of particles and which prevent a drop in electrical characteristics from occurring on the silicon wafer.