The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2003
Filed:
Dec. 27, 1999
Applicant:
Inventors:
Assignee:
Agency of Industrial Science and Technology, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05D 3/06 ; B05D 5/06 ; G02B 5/18 ;
U.S. Cl.
CPC ...
B05D 3/06 ; B05D 5/06 ; G02B 5/18 ;
Abstract
This invention provides a method of manufacturing a diffraction grating capable of scribing by an interference light at a lower power density than usual. That is, a coating solution containing a metal alkoxide and a &bgr;-diketone is coated on a substrate, the coated film is heat treated to form a gelled film and then an interference light is irradiated to the gelled film, to manufacture a diffraction grating.