The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2003
Filed:
Oct. 08, 1996
Applicant:
Inventors:
Paul Rich, Bristol, GB;
David John Thomas, Chepstow, GB;
Assignee:
Trikon Technologies Limited, Gwent, GB;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/434 ; B05D 3/02 ; H01L 2/14763 ; H01L 2/144 ;
U.S. Cl.
CPC ...
C23C 1/434 ; B05D 3/02 ; H01L 2/14763 ; H01L 2/144 ;
Abstract
A workpiece is processed which includes a multiplicity of recesses formed in the exposed surface. The invention includes depositing a first barrier layer of for example, titanium nitride, a second layer of aluminium alloy and a third relatively thin layer of titanium nitride and then exposing the sandwich of layers to elevated heat and pressure so that the second layer is deformed to fill the recesses