The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2003
Filed:
Feb. 23, 2001
Robert K. Leidy, Burlington, VT (US);
Paul D. Sonntag, Colchester, VT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A vacuum chuck/insert assembly ( ) for firmly supporting a semiconductor wafer ( ) during wafer processing. The vacuum chuck comprises a chuck ( ) and a removable insert ( ). The chuck includes a base ( ) and a plurality of spacers ( ) for holding the insert in spaced relationship to the base of the chuck. The chuck further includes first and second vacuum seals ( ) and vacuum ports ( ) extending through the base of the chuck. The insert includes a base ( ) and a plurality of spacers ( ) for holding the wafer in spaced relationship to the base of the insert. The insert further includes a vacuum seal ( ) and vacuum ports ( ) extending through the base of the insert. During operation, vacuum applied to the vacuum chuck/insert assembly holds the insert firmly in contact with the chuck and the wafer firmly in contact with the insert.