The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2003
Filed:
Dec. 21, 2000
Applicant:
Inventors:
Aarne Oja, Espoo, FI;
Heikki Seppä, Helsinki, FI;
Teuvo Sillanp{umlaut over (aa)}, Helsinki, FI;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 7/16 ;
U.S. Cl.
CPC ...
G01B 7/16 ;
Abstract
The invention concerns a silicon micromechanical weight sensor ( ). According to the invention, the weight sensor comprises at least two conducting electrodes ( ) displaced at a distance from each other, whereby one of the elastically suspended electrode surfaces ( ) or, alternatively, a structure connected thereto, acts as the pan surface of the weight sensor.