The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2003
Filed:
Apr. 16, 2001
Applicant:
Inventor:
Gerd Fürter, Ellwangen, DE;
Assignee:
Carl-Zeiss-Stiftung, Heidenheim-Brenz, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 2/754 ; G03B 2/742 ; G03B 2/732 ; G03C 5/00 ; A61N 5/00 ;
U.S. Cl.
CPC ...
G03B 2/754 ; G03B 2/742 ; G03B 2/732 ; G03C 5/00 ; A61N 5/00 ;
Abstract
The invention is directed to a projection exposure apparatus for the flat panel display manufacture having an objective array and magnifying objectives (O to O ).
Quick Actions:
Fürter, Gerd. (2003). Projection exposure apparatus and exposure method (U.S. Patent No. 6512573). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6512573
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile