The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2003
Filed:
Apr. 28, 1999
Applicant:
Inventor:
Hiromichi Hara, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 2/742 ; G03B 2/758 ; G03B 2/762 ;
U.S. Cl.
CPC ...
G03B 2/742 ; G03B 2/758 ; G03B 2/762 ;
Abstract
An anti-vibration system with air dampers of high natural frequency, in a compact space. A pair of air dampers are disposed with their driving directions opposed to each other, and inside pressures of these dampers are variably controlled so as set the natural vibration frequency.
Hara, Hiromichi. (2003). Anti-vibration system for exposure apparatus (U.S. Patent No. 6512571). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6512571
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile