The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 28, 2003

Filed:

Apr. 12, 2001
Applicant:
Inventors:

Daniel M. Kinzer, El Segundo, CA (US);

Srikant Sridevan, Redondo Beach, CA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/978 ;
U.S. Cl.
CPC ...
H01L 2/978 ;
Abstract

A superjunction device has a large number of symmetrically located vertical circular wells in a high resistivity silicon substrate. A plurality of alternate opposite conductivity N and P stripes or nodes are formed along the length of the walls of each of the wells. Each of the nodes faces an opposite concentration type node in an adjacent well. A DMOS gate structure is connected to the tops of the N stripes. The nodes have a depth and concentration to cause full depletion of all nodes during reverse bias. Current flows through the relatively low resistance N stripes when its gate is turned on. A conventional termination such as a diffused ring or rings can surround the active area of all cells and is formed in the high resistivity substrate.


Find Patent Forward Citations

Loading…