The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2003
Filed:
Feb. 14, 2000
Applicant:
Inventors:
James R. Lansbarkis, El Dorado, CA (US);
Jon S. Gingrich, Sacramento, CA (US);
Assignee:
UOP LLC, Des Plaines, IL (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B01D 5/304 ; B01D 5/326 ;
U.S. Cl.
CPC ...
B01D 5/304 ; B01D 5/326 ;
Abstract
Commonly available carbon dioxide may contain unacceptable amounts of compounds containing greater than about ten carbon atoms, sulfur-containing materials, and nitrogen-containing materials which are particularly detrimental to semiconductor and silicon wafer processing-related uses of carbon dioxide. These impurities can be effectively removed by a combination of metal oxide, silica gel, and activated carbon, thus permitting an on-site, on-demand, convenient, and economic method of purifying carbon dioxide ranging from laboratory scale operations to tank car scale operations.