The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 21, 2003
Filed:
Feb. 16, 2000
Applicant:
Inventors:
Stephan Biermann, Gernsbach, DE;
Georg Spörl, Rheinstetten, DE;
Assignee:
precitec GmbH, Rotenfels, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 2/732 ; G01R 2/726 ;
U.S. Cl.
CPC ...
G01R 2/732 ; G01R 2/726 ;
Abstract
The invention relates to a method and a device for measuring the distance between a sensor electrode and a workpiece. The sensor electrode forms, with the workpiece, a measuring capacitor through which an alternating current flows. A voltage present at the sensor electrode is tapped as a measuring voltage. In order to be able to remove the disturbing influence on the impedance of the measuring capacitor of a plasma forming between the sensor electrode and workpiece, the real part and the imaginary part from the measuring voltage are analyzed and used to determine the distance between the sensor electrode and the workpiece.