The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6509070 B1

PDF
Full Text
Expired
Date of Patent:
Jan. 21, 2003

Filed:

May. 29, 2001
Applicant:
Inventors:

Andrey A. Voevodin, Dayton, OH (US);

John G. Jones, Dayton, OH (US);

Jeffrey S. Zabinski, Yellow Springs, OH (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05H 1/00 ;
U.S. Cl.
CPC ...
H05H 1/00 ;
Abstract

Formation of for example yttria stabilized zirconia films of significant 001 orientation on a variety of substrates including amorphous material and room temperature limited material is disclosed. The yttria stabilized zirconia film formation is achieved using pulsed laser ablation of a polycrystalline yttria stabilized zirconia target source while the substrate is electrically biased, disposed at a selected angle and maintained at substantially room temperature in the presence of an argon atmosphere. The film formation uses low bias voltage, requires no ion beam apparatus and employs low temperatures sufficient only to enable process stabilization. Film formation is accomplished in a step sequence wherein each step responds to temporal and spatial component segregations occurring in a laser-ablated ion plume.


Find Patent Forward Citations

Voevodin, Andrey. (2003). Laser ablation, low temperature-fabricated yttria-stabilized zirconia oriented films (U.S. Patent No. 6509070). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6509070

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…