The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6508125 B1

PDF
Full Text
Expired
Date of Patent:
Jan. 21, 2003

Filed:

Mar. 12, 2001
Applicant:
Inventor:

Hiroshi Otani, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 1/525 ;
U.S. Cl.
CPC ...
G01P 1/525 ;
Abstract

An electrostatic capacitance type acceleration sensor, an electrostatic capacitance type angular acceleration sensor and an electrostatic actuator are provided each having a low probability of damage to electrodes even when an excessive acceleration is applied. A movable electrode is provided instead of a fixed electrode conventionally used in the background art to include two movable electrodes. The rigidities of beams of a first movable electrode and a second movable electrode are controlled so that the amounts of movement of the first movable electrode and the second movable electrode are different from each other during application of an acceleration. The acceleration is detected by a change in capacitance between the first movable electrode and the second movable electrode.


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