The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 21, 2003

Filed:

Jan. 17, 2001
Applicant:
Inventors:

Tomoyasu Hasegawa, Sagamihara, JP;

Kaneo Yaji, Sagamihara, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 1/900 ; H01L 4/108 ;
U.S. Cl.
CPC ...
G01C 1/900 ; H01L 4/108 ;
Abstract

An angular velocity sensor includes: a vibrator; a support for supporting the vibrator so as to be capable of vibrating; a driver for driving the vibrator by an electrostatic force; a detector for detecting a displacement of the vibrator based on a Coriolis force applied to the vibrator as a variation of electrostatic capacitance; and a capacitance-voltage converting circuit for converting the variation of the electrostatic capacitance detected by the detector into a voltage variation, the capacitance-voltage converting circuit being made as a source-follower circuit connected to a high-resistance gate resistor between a gate and a source using a JFET, and wherein the gate of the JFET is connected to a bias power supply via a bias resistor.


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