The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2003
Filed:
Oct. 20, 2000
Yosuke Jinbo, Tokyo, JP;
Norio Kobayashi, Tokyo, JP;
Hoya-Schott Corporation, Tokyo, JP;
Abstract
An ultraviolet light beam irradiating apparatus of the present invention has a bed for supporting a work in atmosphere, an ultraviolet light irradiation light source for irradiating the surface of the work with an ultraviolet light beam having a wavelength of 175 nm or shorter, and inert gas inflow structure for allowing an inert gas, preferably nitrogen, helium or argon, into a space in the atmosphere above the work surface of the work. The inert gas is allowed to flow into the space, whereby the oxygen concentration between the ultraviolet light irradiation light source and the work surface is decreased, so that the absorption of the ultraviolet light beam is decreased.