The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6507017 B1

PDF
Full Text
Expired
Date of Patent:
Jan. 14, 2003

Filed:

May. 16, 2001
Applicant:
Inventors:

Ron Naaman, Nes Ziona, IL;

Zeev Vager, Rehovot, IL;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 3/14 ; H01J 4/014 ; H01J 5/16 ;
U.S. Cl.
CPC ...
H01J 3/14 ; H01J 4/014 ; H01J 5/16 ;
Abstract

An apparatus ( ) for optical inspection of an article(s) is presented. The apparatus utilizes near-field illumination, and comprises a light source unit ( ) generating incident light, a detector unit ( ), a fiber bundle for directing ( C) the incident light onto a substantially large surface area ( A) of the article and collecting light ( B) returned from the illuminated surface area, and a control means ( ). The control means comprises sensing means consisting of at least three tips for atomic force (AFM) or current tunneling (STM) measurement at sample surface, and is capable of adjusting the position of the fiber bundle relative to the surface of the article.


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Naaman, Ron. (2003). Near-field optical inspection apparatus (U.S. Patent No. 6507017). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6507017

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