The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2003
Filed:
Feb. 01, 2000
Harold R. Fetterman, Pacific Palisades, CA (US);
Leonid Bukshpun, West Hollywood, CA (US);
Joseph Michael, Los Angeles, CA (US);
Pacific Wave Industries, Inc., Los Angeles, CA (US);
Abstract
A method of batch fabrication of ultraminiature fiber optic pressure transducers including the steps of: providing a first substrate with a first sacrificial layer formed thereover; forming a plurality of light reflective diaphragm structures on the first sacrificial layer; forming a plurality of fiber stopper structures on the light reflective diaphragm structures; forming a plurality of fiber alignment cavity structures on the fiber stopper structures, the light reflective diaphragm structures, fiber stopper structures and fiber alignment cavity structures providing a plurality of fiber alignment assemblies; providing a second substrate with a second sacrificial layer formed thereover; forming a plurality of ferrule structures over the second sacrificial layer; inputting a plurality of fibers into the ferrule structures and sealing each of the ferrule structures to the fiber inserted therein, the ferrule structures and the fibers providing a plurality of fiber-ferrule assemblies; etching the second sacrificial layer releasing the fiber-ferrule assemblies; inputting the fiber-ferrule assemblies into the fiber alignment assemblies and sealing each of the fiber alignment assemblies to the fiber-ferrule assembly inserted therein, the fiber alignment assemblies and the fiber-ferrule assemblies providing a plurality of fiber optic pressure transducers; and etching the first sacrificial layer releasing the fiber optic pressure transducers.