The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2003
Filed:
Oct. 02, 2001
Applicant:
Inventors:
Hiroshi Murakami, Kyoto, JP;
Takashi Mikami, Kyoto, JP;
Assignee:
Nissin Electric Co., Ltd., Kyoto, JP;
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/432 ;
U.S. Cl.
CPC ...
C23C 1/432 ;
Abstract
The vacuum arc evaporation apparatus removes coarse particles from plasma containing cathode materials generated from a cathode provided to a evaporation source by a vacuum arc discharge, and is provided with a porous member on the inside wall of a plasma duct equipped with means for forming deflection magnetic field having a magnetic coil outside thereof so as to guide the plasma in the vicinity of a substrate accommodated in the film forming chamber
Quick Actions:
Murakami, Hiroshi. (2003). Film forming apparatus (U.S. Patent No. 6506292). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6506292
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile