The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2003
Filed:
Jan. 06, 2000
Applicant:
Inventors:
Roger L. Frick, Hackensack, MN (US);
Charles R. Willcox, Eden Prairie, MN (US);
Assignee:
Rosemount Inc., Eden Prairie, MN (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 9/12 ;
U.S. Cl.
CPC ...
G01L 9/12 ;
Abstract
A pressure sensor with a diaphragm that has a dielectric portion that moves in a cavity near capacitor plates that are fixed relative to a mounting frame. The diaphragm is supported on the frame and the frame surrounds the cavity. The diaphragm has an outer surface that receives pressure and has an inner surface facing the cavity. The capacitor plates, which are fixed, sense movement of the nearby dielectric portion and generate an electrical output representative of pressure. Creep of metallizations on a flexible diaphragm are avoided. Manufacture is simplified because metallization of the diaphragm is avoided.