The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2003
Filed:
Jun. 02, 2000
Ping Zhou, Glendale, AZ (US);
Robert Kehl Sink, Santa Barbara, CA (US);
Calient Networks, Inc., San Jose, CA (US);
Abstract
A micro-electro-mechanical-system (MEMS) mirror device passive alignment fabrication method is disclosed. In one embodiment, the method includes forming a release layer on a first substrate, forming a mirror pattern having a center mirror component and a hinge pattern supported by the release layer, forming a first passive alignment mechanism on the first substrate, forming an electrode layer on a second substrate, forming a second passive alignment mechanism on the second substrate, aligning the first and second substrates using the first and second passive alignment mechanisms, and attaching the first substrate with the second substrate by inserting a passive non-thermal bonding mechanism through the first and second passive alignment mechanisms.